Field reversal in low pressure, unmagnetized radio frequency capacitively coupled argon plasma discharges.
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| Title: | Field reversal in low pressure, unmagnetized radio frequency capacitively coupled argon plasma discharges. |
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| Authors: | Wen, De-Qi1,2, wendeqi@msu.edu, Krek, Janez2, Gudmundsson, Jon Tomas3,4, Kawamura, Emi5, Lieberman, Michael A5, Zhang, Peng1, Verboncoeur, John P1,2 |
| Source: | Applied Physics Letters; 12/25/2023, Vol. 123 Issue 26, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0179467 |
