Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers.
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| Title: | Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers. |
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| Authors: | Butt, Jordan N.1,2, Tyndall, Nathan F.1, Pruessner, Marcel W.1, Walsh, Kyle J.1, Miller, Benjamin L.3,4, Fahrenkopf, Nicholas M.5,6, Antohe, Alin O.5,6, Stievater, Todd H.1, todd.h.stievater.civ@us.navy.mil |
| Source: | APL Photonics; Jan2024, Vol. 9 Issue 1, p1-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 23780967 |
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| DOI: | 10.1063/5.0173914 |
