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Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.

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Bibliographic Details
Title: Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.
Authors: Hu, Shao-Hwa1, Lin, Yen-Sheng2, yslin@isu.edu.tw, Su, Shui-Hsiang2, He, Jing-Shi1, Ai, Ya-Zhao1
Source: Journal of Electronic Materials; May2024, Vol. 53 Issue 5, p2410-2420, 11p
Database: Applied Science & Technology Source
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ISSN:03615235
DOI:10.1007/s11664-024-10983-4