APA (7th ed.) Citation

Hu, S., Lin, Y., Su, S., He, J., & Ai, Y. (2024). Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering. Journal of Electronic Materials, 53(5), 2410. https://doi.org/10.1007/s11664-024-10983-4

Chicago Style (17th ed.) Citation

Hu, Shao-Hwa, Yen-Sheng Lin, Shui-Hsiang Su, Jing-Shi He, and Ya-Zhao Ai. "Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering." Journal of Electronic Materials 53, no. 5 (2024): 2410. https://doi.org/10.1007/s11664-024-10983-4.

MLA (9th ed.) Citation

Hu, Shao-Hwa, et al. "Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering." Journal of Electronic Materials, vol. 53, no. 5, 2024, p. 2410, https://doi.org/10.1007/s11664-024-10983-4.