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Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.

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Title: Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.
Authors: Hu, Shao-Hwa1, Lin, Yen-Sheng2, yslin@isu.edu.tw, Su, Shui-Hsiang2, He, Jing-Shi1, Ai, Ya-Zhao1
Source: Journal of Electronic Materials; May2024, Vol. 53 Issue 5, p2410-2420, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 176353897
AccessLevel: 2
PubType: Academic Journal
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PreciseRelevancyScore: 0
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  Data: Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.
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  Data: <searchLink fieldCode="AU" term="%22Hu%2C+Shao-Hwa%22">Hu, Shao-Hwa</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Lin%2C+Yen-Sheng%22">Lin, Yen-Sheng</searchLink><relatesTo>2</relatesTo>, <i>yslin@isu.edu.tw</i><br /><searchLink fieldCode="AU" term="%22Su%2C+Shui-Hsiang%22">Su, Shui-Hsiang</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22He%2C+Jing-Shi%22">He, Jing-Shi</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Ai%2C+Ya-Zhao%22">Ai, Ya-Zhao</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electronic+Materials%22">Journal of Electronic Materials</searchLink>; May2024, Vol. 53 Issue 5, p2410-2420, 11p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=176353897
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      – Type: doi
        Value: 10.1007/s11664-024-10983-4
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      – Code: eng
        Text: English
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        PageCount: 11
        StartPage: 2410
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      – TitleFull: Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.
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            NameFull: Hu, Shao-Hwa
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            NameFull: Lin, Yen-Sheng
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            NameFull: Su, Shui-Hsiang
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            NameFull: He, Jing-Shi
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            NameFull: Ai, Ya-Zhao
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            – D: 01
              M: 05
              Text: May2024
              Type: published
              Y: 2024
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              Value: 53
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