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Low Loss 1 × 16/40 Flat Type Beam Splitters on Thin Film Lithium Niobate Using Photolithography Assisted Chemo‐Mechanical Etching.

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Bibliographic Details
Title: Low Loss 1 × 16/40 Flat Type Beam Splitters on Thin Film Lithium Niobate Using Photolithography Assisted Chemo‐Mechanical Etching.
Authors: Zhu, Zhuangzhuang1,2,3, Wang, Zhe4, Fang, Zhiwei4, zwfang@phy.ecnu.edu.cn, Lin, Dong1,2,3, Zhou, Yuan3,5, Zhong, Yunxian1,2,3, Xu, Jian4, He, Jinping1,2,6, jphe@niaot.ac.cn, Cheng, Ya4,5,7, ya.cheng@siom.ac.cn
Source: Laser & Photonics Reviews; May2024, Vol. 18 Issue 5, p1-9, 9p
Database: Applied Science & Technology Source
Description
ISSN:18638880
DOI:10.1002/lpor.202301052