Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1−xGex/Si(001) layers through dynamic growth rate control.
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| Title: | Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1−xGex/Si(001) layers through dynamic growth rate control. |
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| Authors: | Becker, L.1,2, lucas.becker@siltronic.com, Storck, P.1, Liu, Y.3, Schwalb, G.1, Schroeder, T.4,5, Fischer, I. A.2, Albrecht, M.4 |
| Source: | Journal of Applied Physics; 5/28/2024, Vol. 135 Issue 20, p1-9, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0204318 |
