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Pulsed Aerosol-Assisted Low-Pressure Plasma for Thin-Film Deposition.

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Bibliographic Details
Title: Pulsed Aerosol-Assisted Low-Pressure Plasma for Thin-Film Deposition.
Authors: Carnide, G.1,2, Simonnet, C.1,3, Parmar, D.1,2, Zavvou, Z.1,2, Klein, H.1,2, Conan, R.1, Pozsgay, V.1, Verdier, T.1, Villeneuve-Faure, C.1, Kahn, M. L.2, Stafford, L.3, Clergereaux, R.1, richard.clergereaux@laplace.univ-tlse.fr
Source: Plasma Chemistry & Plasma Processing; May2024, Vol. 44 Issue 3, p1343-1356, 14p
Database: Applied Science & Technology Source
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ISSN:02724324
DOI:10.1007/s11090-024-10455-x