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Comparative Study of DC, Unipolar and Bipolar Pulsed Electroplating Profile of Thick Gold Structures for MEMS Devices.

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Bibliographic Details
Title: Comparative Study of DC, Unipolar and Bipolar Pulsed Electroplating Profile of Thick Gold Structures for MEMS Devices.
Authors: Raghav, Khushbu1,2, Kaur, Maninder1, Upadhyay, Anand1, Kumar, Amit1,2, Bansal, Deepak1,2, deepak@ceeri.res.in
Source: Journal of Electronic Materials; Aug2024, Vol. 53 Issue 8, p4529-4538, 10p
Database: Applied Science & Technology Source
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Description
ISSN:03615235
DOI:10.1007/s11664-024-11184-9