P‐98: High‐Quality OLED Display Panel Using Optimized IGZO Deposition Process through Eliminating Sputter Target Mura.

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Bibliographic Details
Title:	P‐98: High‐Quality OLED Display Panel Using Optimized IGZO Deposition Process through Eliminating Sputter Target Mura.
Authors:	Zhao, Ce¹, Choi, YongHo¹, Fang, Jingang¹, Wang, Ming¹, Yan, Liangchen¹, Yu, Jianwei¹
Source:	SID Symposium Digest of Technical Papers; Jun2024, Vol. 55 Issue 1, p1766-1768, 3p
Database:	Applied Science & Technology Source

Description
ISSN:	0097966X
DOI:	10.1002/sdtp.17915