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Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.

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Title: Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.
Authors: Liang, Mengjie1, liangmengjie@hust.edu.cn, Fang, Ji1, liangmengjie@hust.edu.cn, Chen, Dunkui1, Chen, Lang1, Peng, Lingling1, Zhang, Chi1, Chen, Yingchun1, Lu, Xiang2, liangmengjie@hust.edu.cn
Source: Applied Sciences (2076-3417); Sep2024, Vol. 14 Issue 17, p8073, 13p
Database: Applied Science & Technology Source
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ISSN:20763417
DOI:10.3390/app14178073