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Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.

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Title: Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.
Authors: Liang, Mengjie1, liangmengjie@hust.edu.cn, Fang, Ji1, liangmengjie@hust.edu.cn, Chen, Dunkui1, Chen, Lang1, Peng, Lingling1, Zhang, Chi1, Chen, Yingchun1, Lu, Xiang2, liangmengjie@hust.edu.cn
Source: Applied Sciences (2076-3417); Sep2024, Vol. 14 Issue 17, p8073, 13p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 179650596
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.
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  Data: <searchLink fieldCode="AU" term="%22Liang%2C+Mengjie%22">Liang, Mengjie</searchLink><relatesTo>1</relatesTo>, <i>liangmengjie@hust.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Fang%2C+Ji%22">Fang, Ji</searchLink><relatesTo>1</relatesTo>, <i>liangmengjie@hust.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Chen%2C+Dunkui%22">Chen, Dunkui</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+Lang%22">Chen, Lang</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Peng%2C+Lingling%22">Peng, Lingling</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Chi%22">Zhang, Chi</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+Yingchun%22">Chen, Yingchun</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Lu%2C+Xiang%22">Lu, Xiang</searchLink><relatesTo>2</relatesTo>, <i>liangmengjie@hust.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Sciences+%282076-3417%29%22">Applied Sciences (2076-3417)</searchLink>; Sep2024, Vol. 14 Issue 17, p8073, 13p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=179650596
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.3390/app14178073
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 8073
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      – TitleFull: Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.
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            NameFull: Liang, Mengjie
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            NameFull: Fang, Ji
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            NameFull: Peng, Lingling
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            NameFull: Zhang, Chi
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            NameFull: Chen, Yingchun
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            – D: 01
              M: 09
              Text: Sep2024
              Type: published
              Y: 2024
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              Value: 14
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            – TitleFull: Applied Sciences (2076-3417)
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