Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing.
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| Title: | Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing. |
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| Authors: | Liang, Mengjie1, liangmengjie@hust.edu.cn, Fang, Ji1, liangmengjie@hust.edu.cn, Chen, Dunkui1, Chen, Lang1, Peng, Lingling1, Zhang, Chi1, Chen, Yingchun1, Lu, Xiang2, liangmengjie@hust.edu.cn |
| Source: | Applied Sciences (2076-3417); Sep2024, Vol. 14 Issue 17, p8073, 13p |
| Database: | Applied Science & Technology Source |
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