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Regulating the coefficient of thermal expansion in electrodeposited Invar alloy films for fine metal masks via vacuum and hydrogen annealing.

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Bibliographic Details
Title: Regulating the coefficient of thermal expansion in electrodeposited Invar alloy films for fine metal masks via vacuum and hydrogen annealing.
Authors: Ren, Wei1, Yu, Yu1, Lan, Xi1, Guo, Lei1, Guo, Zhancheng1, zcguo@ustb.edu.cn
Source: Journal of Materials Science; Sep2024, Vol. 59 Issue 36, p17278-17292, 15p
Database: Applied Science & Technology Source
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ISSN:00222461
DOI:10.1007/s10853-024-10193-7