Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints.
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| Title: | Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints. |
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| Authors: | Gu, Lei1, 2109853vmi30001@student.must.edu.mo, Wu, Naiqi1, nqwu@must.edu.mo, Qiao, Yan1, Zhang, Siwei1, Li, Tan1 |
| Source: | Applied Sciences (2076-3417); Oct2024, Vol. 14 Issue 20, p9490, 26p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20763417 |
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| DOI: | 10.3390/app14209490 |
