APA (7th ed.) Citation

Gu, L., Wu, N., Qiao, Y., Zhang, S., & Li, T. (2024). Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints. Applied Sciences (2076-3417), 14(20), 9490. https://doi.org/10.3390/app14209490

Chicago Style (17th ed.) Citation

Gu, Lei, Naiqi Wu, Yan Qiao, Siwei Zhang, and Tan Li. "Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints." Applied Sciences (2076-3417) 14, no. 20 (2024): 9490. https://doi.org/10.3390/app14209490.

MLA (9th ed.) Citation

Gu, Lei, et al. "Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints." Applied Sciences (2076-3417), vol. 14, no. 20, 2024, p. 9490, https://doi.org/10.3390/app14209490.