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Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints.

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Title: Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints.
Authors: Gu, Lei1, 2109853vmi30001@student.must.edu.mo, Wu, Naiqi1, nqwu@must.edu.mo, Qiao, Yan1, Zhang, Siwei1, Li, Tan1
Source: Applied Sciences (2076-3417); Oct2024, Vol. 14 Issue 20, p9490, 26p
Database: Applied Science & Technology Source
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              Text: Oct2024
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