High-Performance SAW-Based Microfluidic Actuators Composed of Sputtered Al–Cu IDT Electrodes.
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| Title: | High-Performance SAW-Based Microfluidic Actuators Composed of Sputtered Al–Cu IDT Electrodes. |
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| Authors: | Kim, Hwansun1, hwan@koreamems.com, Lee, Youngjin2, yjlee@kicet.re.kr, Puneetha, Peddathimula3, puneethaphd@gmail.com, An, Sung Jin4, sungjinan@kumoh.ac.kr, Park, Jae-Cheol5, jerwual@kitech.re.kr, Mallem, Siva Pratap Reddy6, jerwual@kitech.re.kr |
| Source: | Coatings (2079-6412); Nov2024, Vol. 14 Issue 11, p1420, 13p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings14111420 |
