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Etching Processing of InGaAs/InAlAs Quantum Cascade Laser.

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Title: Etching Processing of InGaAs/InAlAs Quantum Cascade Laser.
Authors: Wu, Qi1,2,3,4, wuqihainan@163.com, Zhu, Yana1,2,3,4, 15607693682@163.com, Xu, Dongxin1,2,3,4, jilinchangchun@yeah.net, Li, Zaijin1,2,3,4, lizaijin@hainu.edu.cn, Qu, Yi1,2,3,4, quyihainan@126.comqzhl060910@hainnu.edu.cn, Qiao, Zhongliang1,2,3,4, gjliu626@126.com, Liu, Guojun1,2,3,4, 060111@hainnu.edu.cn, Zhao, Zhibin1,2,3,4, zenglina@hainnu.edu.cn, Zeng, Lina1,2,3,4, 15948713468@163.cm, Chen, Hao1,2,3,4, lin.li@hainnu.edu.cn, Li, Lin1,2,3,4
Source: Coatings (2079-6412); Nov2024, Vol. 14 Issue 11, p1448, 8p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings14111448