Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures.
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| Title: | Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures. |
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| Authors: | Okuda, Tomoya1, Ota, Shunsuke1, Kawahara, Takahiko2, Makiyama, Kozo2, Nakata, Ken2, Maeda, Takuya3, Kobayashi, Atsushi1, akoba@rs.tus.ac.jp |
| Source: | Applied Physics Letters; 2/3/2025, Vol. 126 Issue 5, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0228924 |
