Okuda, T., Ota, S., Kawahara, T., Makiyama, K., Nakata, K., Maeda, T., & Kobayashi, A. (2025). Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures. Applied Physics Letters, 126(5), 1. https://doi.org/10.1063/5.0228924
Chicago Style (17th ed.) CitationOkuda, Tomoya, Shunsuke Ota, Takahiko Kawahara, Kozo Makiyama, Ken Nakata, Takuya Maeda, and Atsushi Kobayashi. "Sputter Epitaxy of ScAlN Films on GaN High Electron Mobility Transistor Structures." Applied Physics Letters 126, no. 5 (2025): 1. https://doi.org/10.1063/5.0228924.
MLA (9th ed.) CitationOkuda, Tomoya, et al. "Sputter Epitaxy of ScAlN Films on GaN High Electron Mobility Transistor Structures." Applied Physics Letters, vol. 126, no. 5, 2025, p. 1, https://doi.org/10.1063/5.0228924.