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Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures.

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Title: Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures.
Authors: Okuda, Tomoya1, Ota, Shunsuke1, Kawahara, Takahiko2, Makiyama, Kozo2, Nakata, Ken2, Maeda, Takuya3, Kobayashi, Atsushi1, akoba@rs.tus.ac.jp
Source: Applied Physics Letters; 2/3/2025, Vol. 126 Issue 5, p1-7, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 182884368
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures.
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  Data: <searchLink fieldCode="AU" term="%22Okuda%2C+Tomoya%22">Okuda, Tomoya</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Ota%2C+Shunsuke%22">Ota, Shunsuke</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Kawahara%2C+Takahiko%22">Kawahara, Takahiko</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Makiyama%2C+Kozo%22">Makiyama, Kozo</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Nakata%2C+Ken%22">Nakata, Ken</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Maeda%2C+Takuya%22">Maeda, Takuya</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Kobayashi%2C+Atsushi%22">Kobayashi, Atsushi</searchLink><relatesTo>1</relatesTo>, <i>akoba@rs.tus.ac.jp</i>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; 2/3/2025, Vol. 126 Issue 5, p1-7, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=182884368
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      – Type: doi
        Value: 10.1063/5.0228924
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      – Code: eng
        Text: English
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      – TitleFull: Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures.
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            NameFull: Okuda, Tomoya
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            NameFull: Ota, Shunsuke
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            NameFull: Kawahara, Takahiko
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            NameFull: Makiyama, Kozo
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            NameFull: Nakata, Ken
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            – D: 03
              M: 02
              Text: 2/3/2025
              Type: published
              Y: 2025
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              Value: 126
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