Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation.
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| Title: | Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation. |
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| Authors: | Salas-Rodríguez, Silvestre1, ssalas84@gmail.com, González-Moreno, Fernanda I.2, fgonzalezm2103@alumno.ipn.mx, Woo-García, Rosa M.3, rwoo@uv.mx, Herrera-May, Agustín L.1, leherrera@uv.mx, López-Huerta, Francisco3, frlopez@uv.mx, Caballero-Briones, Felipe2, fcaballero@ipn.mx |
| Source: | Applied Sciences (2076-3417); Feb2025, Vol. 15 Issue 3, p1573, 14p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20763417 |
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| DOI: | 10.3390/app15031573 |
