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Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation.

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Title: Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation.
Authors: Salas-Rodríguez, Silvestre1, ssalas84@gmail.com, González-Moreno, Fernanda I.2, fgonzalezm2103@alumno.ipn.mx, Woo-García, Rosa M.3, rwoo@uv.mx, Herrera-May, Agustín L.1, leherrera@uv.mx, López-Huerta, Francisco3, frlopez@uv.mx, Caballero-Briones, Felipe2, fcaballero@ipn.mx
Source: Applied Sciences (2076-3417); Feb2025, Vol. 15 Issue 3, p1573, 14p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 182988925
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation.
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  Data: <searchLink fieldCode="AU" term="%22Salas-Rodríguez%2C+Silvestre%22">Salas-Rodríguez, Silvestre</searchLink><relatesTo>1</relatesTo>, <i>ssalas84@gmail.com</i><br /><searchLink fieldCode="AU" term="%22González-Moreno%2C+Fernanda+I%2E%22">González-Moreno, Fernanda I.</searchLink><relatesTo>2</relatesTo>, <i>fgonzalezm2103@alumno.ipn.mx</i><br /><searchLink fieldCode="AU" term="%22Woo-García%2C+Rosa+M%2E%22">Woo-García, Rosa M.</searchLink><relatesTo>3</relatesTo>, <i>rwoo@uv.mx</i><br /><searchLink fieldCode="AU" term="%22Herrera-May%2C+Agustín+L%2E%22">Herrera-May, Agustín L.</searchLink><relatesTo>1</relatesTo>, <i>leherrera@uv.mx</i><br /><searchLink fieldCode="AU" term="%22López-Huerta%2C+Francisco%22">López-Huerta, Francisco</searchLink><relatesTo>3</relatesTo>, <i>frlopez@uv.mx</i><br /><searchLink fieldCode="AU" term="%22Caballero-Briones%2C+Felipe%22">Caballero-Briones, Felipe</searchLink><relatesTo>2</relatesTo>, <i>fcaballero@ipn.mx</i>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Sciences+%282076-3417%29%22">Applied Sciences (2076-3417)</searchLink>; Feb2025, Vol. 15 Issue 3, p1573, 14p
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        Value: 10.3390/app15031573
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      – Code: eng
        Text: English
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        StartPage: 1573
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      – TitleFull: Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation.
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            NameFull: López-Huerta, Francisco
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              M: 02
              Text: Feb2025
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              Y: 2025
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