View in EDS HTML Full Text PDF Full Text

Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding.

Saved in:

Bibliographic Details
Title:	Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding.
Authors:	Calvez, Aziliz¹, Larrey, Vincent^1,2, Noël, Paul¹, Rieutord, François², Fournel, Frank¹, frank.fournel@cea.fr
Source:	Applied Sciences (2076-3417); Apr2025, Vol. 15 Issue 7, p3883, 17p
Database:	Applied Science & Technology Source
Full text is not displayed to guests. Login for full access.

Description
ISSN:	20763417
DOI:	10.3390/app15073883