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Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding.

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Title: Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding.
Authors: Calvez, Aziliz1, Larrey, Vincent1,2, Noël, Paul1, Rieutord, François2, Fournel, Frank1, frank.fournel@cea.fr
Source: Applied Sciences (2076-3417); Apr2025, Vol. 15 Issue 7, p3883, 17p
Database: Applied Science & Technology Source
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        Value: 10.3390/app15073883
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      – Code: eng
        Text: English
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      – TitleFull: Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding.
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              Text: Apr2025
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              Y: 2025
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