Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding.
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| Title: | Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding. |
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| Authors: | Calvez, Aziliz1, Larrey, Vincent1,2, Noël, Paul1, Rieutord, François2, Fournel, Frank1, frank.fournel@cea.fr |
| Source: | Applied Sciences (2076-3417); Apr2025, Vol. 15 Issue 7, p3883, 17p |
| Database: | Applied Science & Technology Source |
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