Investigating the Effect of Sputtering Particle Energy on the Crystal Orientation and Microstructure of NbN Thin Films.
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| Title: | Investigating the Effect of Sputtering Particle Energy on the Crystal Orientation and Microstructure of NbN Thin Films. |
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| Authors: | Dahal, Yam Prasad1,2, suzhenping@buaa.edu.cn, Gu, Bingfu1,2, dahalyam@buaa.edu.cn, Su, Zhenping1, Wang, Sansheng1,2, wangssh@buaa.edu.cn |
| Source: | Coatings (2079-6412); Apr2025, Vol. 15 Issue 4, p460, 14p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings15040460 |
