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Investigating the Effect of Sputtering Particle Energy on the Crystal Orientation and Microstructure of NbN Thin Films.

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Title: Investigating the Effect of Sputtering Particle Energy on the Crystal Orientation and Microstructure of NbN Thin Films.
Authors: Dahal, Yam Prasad1,2, suzhenping@buaa.edu.cn, Gu, Bingfu1,2, dahalyam@buaa.edu.cn, Su, Zhenping1, Wang, Sansheng1,2, wangssh@buaa.edu.cn
Source: Coatings (2079-6412); Apr2025, Vol. 15 Issue 4, p460, 14p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 184754455
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PubType: Academic Journal
PubTypeId: academicJournal
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.3390/coatings15040460
    Languages:
      – Code: eng
        Text: English
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        PageCount: 14
        StartPage: 460
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      – TitleFull: Investigating the Effect of Sputtering Particle Energy on the Crystal Orientation and Microstructure of NbN Thin Films.
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            NameFull: Dahal, Yam Prasad
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            NameFull: Gu, Bingfu
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            NameFull: Su, Zhenping
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              Text: Apr2025
              Type: published
              Y: 2025
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              Value: 20796412
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              Value: 15
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              Value: 4
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