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Application of Ion Energy Spectroscopy to Optimize the Pulsed Laser Deposition Parameters for SrTiO3−y Films.

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Bibliographic Details
Title:	Application of Ion Energy Spectroscopy to Optimize the Pulsed Laser Deposition Parameters for SrTiO3−y Films.
Authors:	Rose, Marcus¹, Shipra, R.¹, Kim, Jeonggoo², Pokhrel, Shiva¹, Seabrease, Richard¹, Paxson, Ryan³, Previti, Madison¹, Schaefer, David¹, Kolagani, Rajeswari¹, rkolagani@towson.edu
Source:	Journal of Electronic Materials; Jun2025, Vol. 54 Issue 6, p4366-4377, 12p
Database:	Applied Science & Technology Source
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ISSN:	03615235
DOI:	10.1007/s11664-025-11952-1