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Characterization of microwave plasma for electromagnetic modeling in processing applications.

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Bibliographic Details
Title: Characterization of microwave plasma for electromagnetic modeling in processing applications.
Authors: Williams, Camille E.1,2, Yakovlev, Vadim V.1, vadim@wpi.edu
Source: Journal of Microwave Power & Electromagnetic Energy; Jun2025, Vol. 59 Issue 2, p170-194, 25p
Database: Applied Science & Technology Source
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Description
ISSN:08327823
DOI:10.1080/08327823.2025.2490434