Characterization of microwave plasma for electromagnetic modeling in processing applications.
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| Title: | Characterization of microwave plasma for electromagnetic modeling in processing applications. |
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| Authors: | Williams, Camille E.1,2, Yakovlev, Vadim V.1, vadim@wpi.edu |
| Source: | Journal of Microwave Power & Electromagnetic Energy; Jun2025, Vol. 59 Issue 2, p170-194, 25p |
| Database: | Applied Science & Technology Source |
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