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Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.

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Bibliographic Details
Title:	Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.
Authors:	Nguyen, Tai¹, tai.nguyen@silicon-austria.comtaint.hut@gmail.com, Ghosh, Anirban¹, Dao, Thang Duy¹, Koblar, Maja², Drazic, Goran^2,3, Andrianov, Nikolai¹, Nesterenko, Iurii¹, Nayak, Sanjay¹, Miranda, Joaquin¹, Golob, Andreja Bencan², Moridi, Mohssen¹, Deluca, Marco¹
Source:	Advanced Science; 6/20/2025, Vol. 12 Issue 23, p1-10, 10p
Database:	Applied Science & Technology Source
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Description
ISSN:	21983844
DOI:	10.1002/advs.202500611