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Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.

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Title: Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.
Authors: Nguyen, Tai1, tai.nguyen@silicon-austria.comtaint.hut@gmail.com, Ghosh, Anirban1, Dao, Thang Duy1, Koblar, Maja2, Drazic, Goran2,3, Andrianov, Nikolai1, Nesterenko, Iurii1, Nayak, Sanjay1, Miranda, Joaquin1, Golob, Andreja Bencan2, Moridi, Mohssen1, Deluca, Marco1
Source: Advanced Science; 6/20/2025, Vol. 12 Issue 23, p1-10, 10p
Database: Applied Science & Technology Source
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              Text: 6/20/2025
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