Interfacial oxide and other species in trimethylaluminum-pretreated atomic layer deposition-Al2O3/GaN characterized by sputter-assisted ToF-SIMS.
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| Title: | Interfacial oxide and other species in trimethylaluminum-pretreated atomic layer deposition-Al2O3/GaN characterized by sputter-assisted ToF-SIMS. |
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| Authors: | Rummel, B. D.1, bdrumme@sandia.gov, Klesko, J. P.1, Meyerson, M. L.1, Ohlhausen, J. A.1, Glaser, C. E.1, Binder, A. T.1, Dickens, P. T.1, Kaplar, R. J.1 |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2025, Vol. 43 Issue 4, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 186471898 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Interfacial oxide and other species in trimethylaluminum-pretreated atomic layer deposition-Al2O3/GaN characterized by sputter-assisted ToF-SIMS. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Rummel%2C+B%2E+D%2E%22">Rummel, B. D.</searchLink><relatesTo>1</relatesTo>, <i>bdrumme@sandia.gov</i><br /><searchLink fieldCode="AU" term="%22Klesko%2C+J%2E+P%2E%22">Klesko, J. P.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Meyerson%2C+M%2E+L%2E%22">Meyerson, M. L.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Ohlhausen%2C+J%2E+A%2E%22">Ohlhausen, J. A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Glaser%2C+C%2E+E%2E%22">Glaser, C. E.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Binder%2C+A%2E+T%2E%22">Binder, A. T.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Dickens%2C+P%2E+T%2E%22">Dickens, P. T.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Kaplar%2C+R%2E+J%2E%22">Kaplar, R. J.</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+A-Vacuums%2C+Surfaces+%26+Films%22">Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films</searchLink>; Jul2025, Vol. 43 Issue 4, p1-7, 7p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186471898 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1116/6.0004311 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 7 StartPage: 1 Titles: – TitleFull: Interfacial oxide and other species in trimethylaluminum-pretreated atomic layer deposition-Al2O3/GaN characterized by sputter-assisted ToF-SIMS. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Rummel, B. D. – PersonEntity: Name: NameFull: Klesko, J. P. – PersonEntity: Name: NameFull: Meyerson, M. L. – PersonEntity: Name: NameFull: Ohlhausen, J. A. – PersonEntity: Name: NameFull: Glaser, C. E. – PersonEntity: Name: NameFull: Binder, A. T. – PersonEntity: Name: NameFull: Dickens, P. T. – PersonEntity: Name: NameFull: Kaplar, R. J. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 07 Text: Jul2025 Type: published Y: 2025 Identifiers: – Type: issn-print Value: 07342101 Numbering: – Type: volume Value: 43 – Type: issue Value: 4 Titles: – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films Type: main |
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