Figure of merit for piezoelectric MEMS speakers.
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| Title: | Figure of merit for piezoelectric MEMS speakers. |
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| Authors: | Sun, Mingchao1, Zhang, Menglun1, zml@tju.edu.cn, Wang, Yale1, Gong, Shaobo1, Sun, Chen1, Sun, Chongling1, Liu, Chengze1, Xu, Linbing1, Pang, Wei1, weipang@tju.edu.cn |
| Source: | Microsystems & Nanoengineering; 7/11/2025, Vol. 11 Issue 1, p1-13, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 20961030 |
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| DOI: | 10.1038/s41378-025-00991-7 |
