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Figure of merit for piezoelectric MEMS speakers.

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Title: Figure of merit for piezoelectric MEMS speakers.
Authors: Sun, Mingchao1, Zhang, Menglun1, zml@tju.edu.cn, Wang, Yale1, Gong, Shaobo1, Sun, Chen1, Sun, Chongling1, Liu, Chengze1, Xu, Linbing1, Pang, Wei1, weipang@tju.edu.cn
Source: Microsystems & Nanoengineering; 7/11/2025, Vol. 11 Issue 1, p1-13, 13p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186624384
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Figure of merit for piezoelectric MEMS speakers.
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  Data: <searchLink fieldCode="AU" term="%22Sun%2C+Mingchao%22">Sun, Mingchao</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Menglun%22">Zhang, Menglun</searchLink><relatesTo>1</relatesTo>, <i>zml@tju.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Wang%2C+Yale%22">Wang, Yale</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Gong%2C+Shaobo%22">Gong, Shaobo</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Sun%2C+Chen%22">Sun, Chen</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Sun%2C+Chongling%22">Sun, Chongling</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Chengze%22">Liu, Chengze</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Xu%2C+Linbing%22">Xu, Linbing</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Pang%2C+Wei%22">Pang, Wei</searchLink><relatesTo>1</relatesTo>, <i>weipang@tju.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Microsystems+%26+Nanoengineering%22">Microsystems & Nanoengineering</searchLink>; 7/11/2025, Vol. 11 Issue 1, p1-13, 13p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186624384
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      – Type: doi
        Value: 10.1038/s41378-025-00991-7
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        Text: English
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      – TitleFull: Figure of merit for piezoelectric MEMS speakers.
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              Text: 7/11/2025
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