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Figure of merit for piezoelectric MEMS speakers.

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Bibliographic Details
Title: Figure of merit for piezoelectric MEMS speakers.
Authors: Sun, Mingchao1, Zhang, Menglun1, zml@tju.edu.cn, Wang, Yale1, Gong, Shaobo1, Sun, Chen1, Sun, Chongling1, Liu, Chengze1, Xu, Linbing1, Pang, Wei1, weipang@tju.edu.cn
Source: Microsystems & Nanoengineering; 7/11/2025, Vol. 11 Issue 1, p1-13, 13p
Database: Applied Science & Technology Source
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