Machine learning assisted nanobeam X‐ray diffraction based analysis on hydride vapor‐phase epitaxy GaN.
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| Title: | Machine learning assisted nanobeam X‐ray diffraction based analysis on hydride vapor‐phase epitaxy GaN. |
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| Authors: | Wu, Zhendong1, u338462d@ecs.osaka-u.ac.jp, Hayashi, Yusuke2, Tohei, Tetsuya1, tohei@ee.es.osaka-u.ac.jp, Sumitani, Kazushi3, Imai, Yasuhiko3, Kimura, Shigeru3, Sakai, Akira1, sakai@ee.es.osaka-u.ac.jp |
| Source: | Journal of Applied Crystallography; Aug2025, Vol. 58 Issue 4, p1205-1219, 15p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218898 |
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| DOI: | 10.1107/S1600576725004169 |
