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Review on Metal (-Oxide, -Nitride, -Oxy-Nitride) Thin Films: Fabrication Methods, Applications, and Future Characterization Methods.

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Title: Review on Metal (-Oxide, -Nitride, -Oxy-Nitride) Thin Films: Fabrication Methods, Applications, and Future Characterization Methods.
Authors: Kotlarski, Georgi1, Stoeva, Daniela1,2, Dechev, Dimitar1,3, Ivanov, Nikolay1,4, Ormanova, Maria1,2, maria.ormanova87@gmail.com, Mateev, Valentin2,3, Marinova, Iliana3,4, Valkov, Stefan1,2,4
Source: Coatings (2079-6412); Aug2025, Vol. 15 Issue 8, p869, 32p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings15080869