Artificial neural network assisted spectroscopic ellipsometry data analysis of hydrogenated amorphous silicon thin films.
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| Title: | Artificial neural network assisted spectroscopic ellipsometry data analysis of hydrogenated amorphous silicon thin films. |
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| Authors: | Bordovalos, Alexander1, Alexander.Bordovalos@rockets.utoledo.edu, Kanneboina, Venkanna1, Dulal, Prabin1, Ramanujam, Balaji1, Shan, Ambalanath1, Podraza, Nikolas J.1, Alexander.Bordovalos@rockets.utoledo.edu |
| Source: | Journal of Applied Physics; 9/7/2025, Vol. 138 Issue 9, p1-13, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0278813 |
