Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas.
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| Title: | Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas. |
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| Authors: | Yang, Dong1, Wang, Xiaokun2, Zhou, Zhenhua3, Li, Hanyang1, Zhang, Wenjin1, Liu, Yongxin4, Schulze, Julian2, Hartmann, Peter5, Donkó, Zoltán5, Fu, Yangyang1,6,7, fuyangyang@tsinghua.edu.cn |
| Source: | Applied Physics Letters; 9/22/2025, Vol. 127 Issue 12, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0281351 |
