Enhanced structural and electrical characteristics of N-polar n-Al0.58Ga0.42N epitaxial layers grown with SiNx interlayer.
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| Title: | Enhanced structural and electrical characteristics of N-polar n-Al0.58Ga0.42N epitaxial layers grown with SiNx interlayer. |
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| Authors: | Huang, Xingyue1, Zhang, Xiong1, xzhang62@aliyun.com, Luo, Xuguang2, Fang, Ruiting1, Li, Liang1, Yang, Zhifeng1,2, Shen, Xiaoting1,2, Chen, Shijie1, Li, Xinwei1, Zhao, Zihao1 |
| Source: | Journal of Materials Science: Materials in Electronics; Oct2025, Vol. 36 Issue 29, p1-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-025-15958-7 |
