Highly accurate classification of material types from spectroscopic ellipsometry heatmap measurements using deep learning.
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| Title: | Highly accurate classification of material types from spectroscopic ellipsometry heatmap measurements using deep learning. |
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| Authors: | Hayashi, Masahiro1, Hilfiker, James N.2, Maekawa, Takuji3, Tampo, Hitoshi4, Koida, Takashi4, Fujiwara, Hiroyuki1, fujiwara.hiroyuki.u7@f.gifu-u.ac.jp |
| Source: | Applied Physics Letters; 11/3/2025, Vol. 127 Issue 18, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0303070 |
