"Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2.
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| Title: | "Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2. |
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| Authors: | Thelven, Jeremy M.1, Margavio, Hannah R. M.1, Oh, Hwan1, Efaw, Corey M.2, Davis, Paul H.2, Graugnard, Elton2, Parsons, Gregory N.1, gnp@ncsu.edu |
| Source: | Advanced Materials Technologies; 12/3/2025, Vol. 10 Issue 23, p1-15, 15p |
| Database: | Applied Science & Technology Source |
| ISSN: | 2365709X |
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| DOI: | 10.1002/admt.202500284 |
