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"Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2.

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Title: "Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2.
Authors: Thelven, Jeremy M.1, Margavio, Hannah R. M.1, Oh, Hwan1, Efaw, Corey M.2, Davis, Paul H.2, Graugnard, Elton2, Parsons, Gregory N.1, gnp@ncsu.edu
Source: Advanced Materials Technologies; 12/3/2025, Vol. 10 Issue 23, p1-15, 15p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 189716074
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: "Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2.
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  Data: <searchLink fieldCode="AU" term="%22Thelven%2C+Jeremy+M%2E%22">Thelven, Jeremy M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Margavio%2C+Hannah+R%2E+M%2E%22">Margavio, Hannah R. M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Oh%2C+Hwan%22">Oh, Hwan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Efaw%2C+Corey+M%2E%22">Efaw, Corey M.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Davis%2C+Paul+H%2E%22">Davis, Paul H.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Graugnard%2C+Elton%22">Graugnard, Elton</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Parsons%2C+Gregory+N%2E%22">Parsons, Gregory N.</searchLink><relatesTo>1</relatesTo>, <i>gnp@ncsu.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Advanced+Materials+Technologies%22">Advanced Materials Technologies</searchLink>; 12/3/2025, Vol. 10 Issue 23, p1-15, 15p
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        Value: 10.1002/admt.202500284
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      – Code: eng
        Text: English
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        PageCount: 15
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      – TitleFull: "Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2.
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            – D: 03
              M: 12
              Text: 12/3/2025
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              Y: 2025
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