Stainless steel diaphragm-based piezoresistive pressure sensor.
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| Title: | Stainless steel diaphragm-based piezoresistive pressure sensor. |
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| Authors: | Chiranackal, Linet Thomas1, Joseph, Jitthu1, jitthujoseph@iisc.ac.in, Belthangady, Pavithra1, Kumar, Kiran1, Kumar, Vijay2, Singh, Jaspreet2, Nayak, M. M.1 |
| Source: | Microsystem Technologies; Dec2025, Vol. 31 Issue 12, p3993-4002, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09467076 |
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| DOI: | 10.1007/s00542-025-05964-4 |
