300 Mm sSOI engineering with ultra thin buried oxide.
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| Title: | 300 Mm sSOI engineering with ultra thin buried oxide. |
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| Authors: | Barge, D.1, david.barge@cea.fr, Gallard, M.1, Hartmann, J.-M.1, Fournel, F.1, Loup, V.1, Mazen, F.1, Nolot, E.1, Hauchecorne, P.1, Sturm, J.1, Le, V.H.1, Huyet, I.2, Delprat, D.2, Boedt, F.2, Servant, F.2 |
| Source: | Solid-State Electronics; Feb2026, Vol. 232, pN.PAG-N.PAG, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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| DOI: | 10.1016/j.sse.2025.109307 |
