Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
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| Title: | Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions. |
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| Authors: | Fields, Shelby Sutton1, shelby.s.fields.civ@us.navy.mil, White, Christopher David1, Knipling, Keith E.1, Bennett, Steven P.1 |
| Source: | Review of Scientific Instruments; Feb2026, Vol. 97 Issue 2, p1-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0303021 |
