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Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.

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Bibliographic Details
Title: Facile optimization of combinatorial sputtering processes with arbitrary numbers of components for targeted compositions.
Authors: Fields, Shelby Sutton1, shelby.s.fields.civ@us.navy.mil, White, Christopher David1, Knipling, Keith E.1, Bennett, Steven P.1
Source: Review of Scientific Instruments; Feb2026, Vol. 97 Issue 2, p1-8, 8p
Database: Applied Science & Technology Source
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